天津大学
TP181
国家自然科学基金项目(面上项目,重点项目,重大项目); 微光机电系统技术教育部重点实验室(天津大学)开放基金; 天津市科技计划项目
Tianjin University
The National Natural Science Foundation of China (General Program, Key Program, Major Research Plan); The open project of Key Laboratory of Micro Opto-electro Mechanical System Technology, Tianjin University, Ministry of Education; Key Technologies Program of Tianjin