Quality characteristic variation and reliability degradation in complex product of compliant mechanism caused by aleatory uncertainty is a basic engineering problem in micro electro mechanical systems (MEMS). In order to conquer this, we propose a novel reliability-based design optimization approach for the complex product of the compliant mechanism. The Latin hypercube design is adopted to experiment design. After collecting experimental data based on the finite element analysis, the Kriging surrogate model is introduced to establish the functional relationship between design variables and a response. Then, the reliability-based design optimization (RBDO) optimization strategy is employed to build the complex product of the compliant mechanism Kriging-RBDO hybrid reliability optimization model. The numerical results illustrate the excellent anti-jamming capability of the proposed approach.