基于Markov跳变过程的硅单晶生长系统有限时间H控制
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O231

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国家自然科学基金项目(62473310, 62127809);陕西省教育厅科研计划项目(23JY053);陕西省科技厅重点研发计划项目(2024GX-YBXM-298);中国博士后科学基金项目(2021MD703879, 2022T150524).


Finite-time anti-disturbance H control for silicon single crystal growth based on Markov jump system models
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    摘要:

    研究系统状态不完全可测且存在外界干扰情况下Markov跳变离散时间硅单晶生长系统的有限时间$H_{\infty}$控制问题. 首先, 充分考虑硅单晶生长过程由于干扰、建模误差、测量噪声诱导的随机因素, 建立基于Markov跳变离散时间硅单晶生长系统模型; 然后, 结合实际硅单晶生长过程测量输出信息, 构造状态观测器和控制器; 接着, 根据Markov跳变理论和有限时间$H_{\infty}$控制理论得到闭环离散时间硅单晶生长系统有限时间有界且满足相应$H_{\infty}$性能的充分条件, 运用线性矩阵不等式(LMI)技术给出控制器和观测器增益的求解方法; 最后, 通过实际硅单晶生长系统模型参数验证所提出控制方案的有效性.

    Abstract:

    This paper studies the finite-time $H_{\infty}$ control problem of Markov jump discrete-time silicon single crystal growth systems under incompletely measurable system states and external disturbances. By introducing the Markov jump process into the silicon single crystal growth model, a Markov jump discrete-time silicon single crystal growth systems are established. Considering that the system state in the actual silicon single crystal growth process is not completely measurable and affected by external disturbances, the state observer and controller are constructed using the measurement outputs. Based on this, according to the Markov jump control system theory and the finite-time $H_{\infty}$ control theory, a sufficient condition is obtained to ensure that the closed-loop discrete-time silicon single crystal growth systems are finite-time bounded with the $H_{\infty}$ performance. The solution method of controller and observer gains is given via using linear matrix inequality (LMI) technology. Finally, the effectiveness of the proposed control scheme is verified by the model parameters of actual silicon single crystal growth systems.

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李艳恺,陈晨,刘丁.基于Markov跳变过程的硅单晶生长系统有限时间H控制[J].控制与决策,2026,41(3):707-717

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  • 收稿日期:2025-08-03
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  • 在线发布日期: 2026-03-04
  • 出版日期: 2026-03-10
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